플라즈마가 형성된 후 챔버 내에서FOCUS RING
Wafer의 표면에 각종 Gas를 일정하게 분사 시켜CATHODE
Product name : C-SHROUD RINGC-SHROUD RING
Product name : ELECTRODE UPPERELECTRODE UPPER
Product name : RING OUTER TOPRING OUTER TOP
Product name : LOWER GDPLOWER GDP
Product name : O.P.N.GO.P.N.G
Product name : UPPER PLATEUPPER PLATE
Product name : GROUND COVERGROUND COVER
Product name : INSULATOR RINGINSULATOR RING
Product name : TWIST WAP RingTWIST WAP Ring
